In order to ensure the crystal structure of face-centered cubic (FCC), most of the existing technologies use nickel-tungsten alloy, nickel-ferrotungsten alloy or nickel-rhenium alloy as the main components of the crystal seed layer. However, most of the prior art seed layers are characterized by coarse grain size (i.e., average grain size is 100 microns to 150 microns), large grain size variation (i.e., average grain size uniformity is about 25% to 40%), and insufficient crystallinity (i.e., strength ratio of (111) crystal direction in FCC structure is less than 60%). As a result, the magnetic recording layer deposited on the seed layer is affected, and there are also defects of coarse grains, large grain size variation and poor crystallinity, and even reduce the recording density of magnetic recording media. In view of this, it is still necessary to try to refine and homogenize the grain size of the seed layer, and at the same time try to improve the crystallinity of the seed layer, so as to improve the film quality of the magnetic recording layer formed in the seed layer, so as to achieve the purpose of increasing the recording density of the magnetic recording media.
The other purpose is to improve the crystallinity of the nickel-rhenium alloy target, so that the spattered crystal seed layer of the nickel-rhenium alloy target can also have better crystallinity; Therefore, when the seed layer is applied to the magnetic recording media, it can help to improve the crystallinity of the magnetic recording layer deposited on the seed layer, so as to increase the recording density of the magnetic recording media.
A nickel-rhenium alloy target comprises nickel, rhenium and a metal composition, the first metal composition comprises aluminum, zirconium or their combination, the total number of atoms of the nickel-rhenium alloy target as a reference, the content of rhenium is greater than 0 atomic percentage (at %) and less than or equal to 7at %, the total content of the first metal composition is greater than 0at % and less than or equal to 3at %, the rest is nickel, The total content of rhenium and first metal components is greater than 0at % and less than 10at %.
