Target material demand in China and the asia-pacific region accounts for more than 70% of the world market share. Many different deposition techniques are used to deposit and grow various thin films, and the target material is the key to make thin films. Current high-end quality target is mainly composed of: Japan, Germany and the United States production, target material industry in China started late, on the fine product quality and standard and the overseas many gap, there are many universities and research institutions to actively invested a lot of study and development of target material, after these years of development, the pearl river delta is a batch of high and new technology target material manufacturer, with a few suppliers has become a well-known international companies such as samsung, they in occupying most of the domestic high-end market share of target.
1 classification of target material application industry
1.1 chromium target (Cr), flat chromium target and chromium-sprayed pipe for decoration and mold coating industry;
Chrome-silicon targets 90/10wt %,50/50at%,25/75at%(arc, plane target, rotating tube target);
Titanium aluminum target 50/50at%,70Ti/30at%,67AL/33at% (arc, plane target, rotating tube target);
Titanium aluminum silicon target 1:1:1at%,1:2:1at%(arc, plane target, rotating tube target);
Titanium target, titanium tube target, zirconium target;
Gold target, rose gold target;
Graphite target, nickel target, aluminum target, stainless steel target.
1.2 target material of solar photovoltaic industry
Zinc-alumina target AZO; Silicon target; Titanium target, titanium oxide target; Aluminum target; Chromium target, nickel chromium; Zinc, aluminum, tungsten, molybdenum target, etc.
1.3 large area coating of building automobile glass
Sial target and rotary sial target; Titanium oxide target; Tin target; Chromium target; Silicon target; Titanium target, stainless steel target.
1.4 plane display industry
ITO target; Silica target; High purity silicon target 4-7n; High purity chromium target. TFT molybdenum target; Molybdenum niobium target; Tungsten titanium target 90/10wt%; High purity aluminum target, etc.
1.5 optical, optical communication, optical storage industry
Silver target; Tantalum target; Zinc sulfide target; High purity aluminum target; Silicon target.
2 commonly used target shape
Common target shapes include arc target, plane target and rotating tube target.
2.1 ways to improve the utilization rate of planar target materials
(1) change the direction of the magnet
(2) change the distribution width and height of magnetic field lines
2.2 target material performance and requirements
The quality of the target material directly affects the physical, appearance, mechanical and other properties of the film, so the evaluation of the quality of the target material is strict, mainly to meet the following requirements: low impurity and oxygen content, high purity; High density; Uniform composition and structure; The grain size is small.
2.3 defects of inferior target materials
A) is the target surface condition after ablation of the fused chromium target
B) pits on the target surface are caused by improper installation of arc guide needle
C) crystal coating target material density is not enough, the difference after ablation
D) poor target of plasma spraying titanium oxide rotating tube.
