Spraying to prepare metal targets is the process of heating the target materials to molten or semi-molten state by electric arc, atomizing them with the help of high-speed gas, forming small melting drops, and accelerating spraying to the surface of liner or liner plate, rapidly cooling and solidifying into metal coating targets. Nonmetallic and ceramic targets are usually sprayed by plasma heating of powder materials. The target casting technology can be divided into three different casting forms: the integral casting without liner or liner plate, the direct casting with liner or liner plate, and the subsection casting with sling and then bonding to the target (Ag, etc.).
This paper relates to a rotating magnetron sputtering target, which comprises a tubular liner and a target material that is fixedly butted on the outer wall of the liner and rotates with the liner. The connection surface of the liner and the target is provided with an intermediate layer, which is a conductive adhesive. The middle layer of the utility model USES conductive adhesive to bind and connect the liner and the target material. Because the conductive adhesive has excellent thermal conductivity and strong bonding ability, it will not generate flow after curing and can replace the expensive indium metal, which saves cost and is more conducive to improving the thermal conductivity of the liner and the target material. In the process of sputtering, the greater the sputtering power is, the greater the heat generated will be. It is easy to miss the target after reaching the melting point of indium. Compared with indium, the decomposition temperature of conductive adhesive is more than twice that of indium. The utility model can be applied to vacuum magnetron sputtering.
Different production processes of thermal spraying and molten casting determine different cost compositions. The production cost of thermal spraying target increases with the increase of target thickness. Different target sizes can be obtained by adjusting the spraying process. The time, gas and energy consumed by spraying are the main factors affecting the cost. However, the cost of the rotary target for melting and casting varies little with the thickness. The target is first formed by melting and casting, and then machined to meet the size requirements. For rotating targets of different sizes, their raw materials and processing costs are basically fixed.
