Tantalum rings are used in the manufacture of semiconductor PVD. When the tantalum ring is covered in the coating process and sputtering off, it will be discarded. Knob (hereinafter referred to as knob) is an accessory of tantalum ring, which is welded to the tantalum ring. Meanwhile, knob has a thick covering on its surface, which cannot be reused. It is usually discarded together with the tantalum ring. As a result, new knob-welded tantalum rings are required, increasing the production cost of the semiconductor. To sum up, it is an urgent technical problem for technicians in this field to realize knob's repair and reuse and reduce the production cost of semiconductor.
In view of this, the purpose of the patented technology is to provide a repair and reuse method for the knob on the tantalum ring to realize the repair and reuse, thus reducing the production cost of the semiconductor. In order to achieve the above purpose, this patented technology provides the following technical scheme: a tantalum ring cylindrical handle repair reuse method, including the following steps: 1) described the knobs on the ring of tantalum and tantalum knobs and stated ring phase welding parts of tantalum ring separate from the stated, knobs for semi-finished products, the semi-finished products described knobs and the diameter of the bottom of the finished product knobs formed between diameter at the bottom of the first preset machining allowance; 2) remove the attached object on the surface of the semi - finished knob; 3) turn the bottom of the semi-finished knob into a preset thickness and a preset diameter with a second preset processing allowance to form a roughing knob; 4) carry out pickling on the surface of the rough-processed knob to remove residual substances and obtain the finished knob. Preferably, in the above repair and reuse method, the above step 1) use the wire cutting device to cut the knob down from the tantalum ring.
