With the rapid development of electronics and information industry, the demand for sputtering target materials is increasing. All kinds of sputtering thin film materials have been widely used in semiconductor integrated circuit, recording medium, plane display and photovoltaic cell. Because molybdenum has high melting point, high conductivity and lower than the resistance, good corrosion resistance and good environmental performance, making molybdenum sputtering target material is widely used in electronic components and electronic products, such as the current widely used TFT - LCD (Thin Film Transitor - Liquid Crystal Displays, Thin Film semiconductor tube - Liquid Crystal display), plasma display panel, Thin Film solar cells, sensor, semiconductor devices, etc., its market prospect.
But as the graphic display of large scale and high precision, on the material than the impedance of thermal stability, corrosion resistance, and demand is higher and higher, and tantalum metal with high melting point, high resistance to chemical corrosion resistance and high temperature resistance and excellent thermal conductivity and electrical conductivity, so molybdenum tantalum alloy composite molybdenum metals and tantalum metal excellent comprehensive performance, gradually get the attention of scholars, and began to research and application of molybdenum tantalum alloy demand of target material also rise sharply. The sputtering target made of molybdenum-tantalum alloy has better corrosion resistance and thermal stability compared with molybdenum target, and its service life is more than 2 times longer than that of pure molybdenum sputtering plane display. Molybdenum-tantalum sputtering target is one of the varieties replacing pure molybdenum sputtering target.
Therefore, due to the limitations of equipment and technology, relatively few researches have been conducted on target materials of molybdenum tantalum alloy in China, and no manufacturer is available for mass production. In the world, Plansee company of Austria monopolizes the target materials. Therefore, the development of molybdenum tantalum alloy target plays an extremely important role in the strategy of "localization of key materials for plane display". It can break the foreign technology monopoly and further improve the market competitiveness of domestic target materials. At the same time, it plays a positive role in promoting the development of molybdenum deep processing industry in China and has good economic and social benefits.
