W-Ti alloy target material is mainly produced by powder metallurgy process. The preparation method of tungsten titanium alloy target material processed by rolling includes the following steps:
(1) Mixing procedure: W powder with a purity of 99.95% and a Fethian particle size of 3.5 m and TiH2 powder with a purity of 99.9% and a particle size of -325 mesh (about less than 45 m) were selected as ingredients. The proportion of ingredients: The mass percentage of TiH2 was 11% and the mass percentage of W powder was 89%. The two raw materials were put into the tank of the mixing machine. The tank was protected by argon by vacuum filling. Then the mixture was mixed for 16h to obtain w-TIH2 mixing powder.
(2) Billet pressing steps: Put the evenly mixed W-TIH2 powder into the mold and form through cold isostatic pressing. The pressure is 150MPa and the holding time is 15min to obtain the W-TIH2 blank.
(3) Pre-burning steps: Pre-burning and reduction of W-TIH2 billet in a flowing hydrogen atmosphere sintering furnace, pre-burning temperature is 1100℃, holding temperature for 4h, and the pre-burning billet is obtained;
(4) Sintering steps: The pre-burned blank was sintered in a vacuum furnace with a vacuum high-temperature sintering temperature of 1× 10-3Pa, a sintering temperature of 1600℃, and a holding time of 3h. The density of the sintered blank was 94%.
(5) Nesting steps: Shape the sintered blank, and use titanium plate as nesting material for nesting processing to get nesting blank;
(6) rolling process: the package set of rolling billet, atmospheric heating atmosphere, sufficiently heating temperature (i.e., for the first time, heating temperature) 1300 ℃, holding time of 60 minutes, each heating a way of rolling times, each time temperature 100 ℃ (that is, every time the heating temperature heating temperature lower than the last 100 ℃), a deformation of 20% of total rolling 4 times, get rolling billet;
(7) Heat treatment steps: Remove the outer cladding material of the rolled blank by machining, and then put it into a vacuum heating furnace for heat treatment. The heat treatment temperature is 800℃, and the heat preservation is 2h to obtain the tungsten titanium alloy target material.
(8) Processing steps: After machining the heat treatment blank through milling and grinding, the final product of tungsten titanium alloy target material with a size of 10×160×800mm is obtained.
