With the rapid development of social economy, electronic products have become indispensable tools and necessities in our life. A very key component of electronic products is the touch screen and optical glass. Coating is realized by magnetron sputtering coating technology, and the material to realize this process is the rotating target material. China and the asia-pacific region of rotation target market demand quantity more than 70% of the world's total demand, market prospect, and optical coating industry for touch screen, magnetic control splash shoot the film, there are two important parameters, respectively is the transmittance and resistivity, magnetron sputtering deposition parameters can reach to depend on the spinning quality of target material, And spinning quality of target material is determined by its production technology and raw material powder formula, after all, the fundamental problem is that the rotation of the target material formulation and production technology, in terms of the existing situation, the formula for niobium oxide content 99. 9%, the rest of the impurities, production technology is relatively simple, this formulation and process of product can satisfy the use requirement of a certain, However, there are also obvious defects, such as high resistivity and low transmittance, which will seriously affect the rapid development of the electronic industry. In order to solve this problem, the most direct method is to use new formula and new process to reduce the resistivity and improve the transmittance.
Its characteristic is that the step is, 1) stainless steel back control: blanking: sawing machine to take the specified length of the stainless steel pipe, the inner diameter of the steel pipe is 125mm, the outer diameter is 133mm; Car tube: the two ends of the stainless steel pipe according to the product drawings respectively car out of the groove, bevel, etc.; Surface sandblasting coarsening: then the stainless steel tube through the sandblasting machine will be sandblasted surface processing; Base: take out the roughened stainless steel tube, spray a layer of CUAL material on its surface through arc spraying machine, the thickness of coating is 0.5 mm, to get the prepared stainless steel back tube; 2) Preparation of niobium oxide doped with niobium coating: powder mixing: according to the weight ratio of claim 1 or 2, take out niobium oxide powder and niobium powder and put them into the mixing machine for mechanical mixing to get the mixed powder; Drying: put the powder mixture in the drying furnace; Vacuum plasma spraying: in the vacuum state, the use of plasma as a heat source to heat the dried mixed powder through the powder feeder to the molten or semi-molten state and high speed impact to the prepared stainless steel back tube surface, forming a dense niobium oxide doped niobium target coating; Mechanical processing: after the target material obtained by vacuum plasma spraying reaches the specified size, mechanical processing is carried out on the forming rotating target, and then cleaning and drying can be carried out after the processing is completed.
