The invention relates to a mechanical continuous knurling process for the inner and outer surface of sputtering tantalum ring. The technological process is as follows: firstly, prepare tantalum strip, cut the connecting gap, pickling, roll, connect the connecting gap, shaping, knurling the inner and outer surface, turning the side arc, carrying out the side knurling, and removing the connecting gap. The invention can realize the uniform 80TPI convex diamond pattern on the inner and outer surfaces and sides of the open sputtered tantalum ring, so as to meet the requirements of semiconductor users.
Physical vapor deposition (PVD) is one of the most critical processes in the production of semiconductor chips. Its purpose is to deposit gold or metal compounds on silicon wafers or other substrates in the form of thin films, and then through photography and corrosion and other technologies, eventually form complex wiring structures in semiconductor chips. Physical vapor deposition is accomplished by sputtering machine, and sputtering tantalum ring is one of the key consumables used in the above process. Sputtering tantalum ring has two main functions in semiconductor process: first, it restrains the motion track of sputtering particles and plays a role of focusing; Second: large particles produced in the process of adsorption sputtering, play the role of purification.
The invention relates to a mechanical continuous knurling process for sputtering tantalum ring inner and outer surface. The process is characterized in that: firstly, prepare tantalum strip, cut the connecting gap, pickling, round, connect the connecting gap, shaping, knurling the inner and outer surface, turning the side arc, knurling the side arc, removing the connecting gap; The surface of the tantalum strip prepared above is smooth; The tantalum strip shall be prepared according to the production requirements. In order to meet the smooth progress of the subsequent process, the surface of the prepared tantalum strip shall be smooth, without scratches, pits and other defects.
Processing equipment for ordinary lathes, first turning about the outline, and then the use of special arc turning tool turning. Side arc knurling: The knurling wheel used for side arc knurling is ordinary twill knurling wheel. The whole arc knurling can be completed in 7 times by changing the Angle of the tool holder.
