The invention discloses a method for making molybdenum alloy target material. It is characterized by the following steps: first, put molybdenum powder and niobium powder into the mold and mix, where Mo powder: Nb powder =5 ~ 15 by weight: Then put the mold into the sintering furnace and heat it up to 900 ~ 1100℃ for 60 ~ 180 minutes, and then heat it up to 1900 ~ 2200℃ for 60 ~ 180 minutes. During the heating process, hydrogen is used for protection, and at the same time, the pressure is 1 ~ 3 tons. When the temperature reaches 1850 ~ 2000℃, Boost pressure to 4 ~ 7 tons, keep pressure at 2000 ~ 2200℃ 4 ~ 7 tons, until the end of heat preservation, after the end of heat preservation, drop temperature and pressure, and then out of the demoulding obtained molybdenum niobium alloy target. The invention provides a new method for making molybdenum-niobium alloy target material with low cost but meeting the requirements in quality and other aspects, which is mainly applied to flat panel display and other fields.
The rapid development of flat display greatly drives the market demand of molybdenum and molybdenum alloy sputtering target material. However, it should be noted that so far, due to the limitation of equipment and technology, there are only a few professional companies producing molybdenum and molybdenum alloy sputtering target materials in China. The molybdenum sputtering target material for LCD panel production line still needs to be imported from abroad.
Put molybdenum powder and niobium powder into the mold and mix them and vibrate to make them mix evenly. Mo powder :Nb powder =9:1 by weight. Nb powder through 300 mesh sieve, sieve powder. Put the mold into the sintering furnace and begin to heat up. Heating process: when the temperature rises to 1000°C for 60 minutes, keep it warm for 120 minutes; when the temperature rises to 2000°C for 120 minutes, keep it warm for 180 minutes; During the whole heating process, hydrogen is used for protection. Pressurizing process: start pressurizing when heating up, the pressure is 2 tons. When the temperature reaches 1950°C, the pressure starts to increase, rising to 5 tons in 20 minutes. Hold pressure at 2000°C for 5 tons until insulation is completed. After thermal insulation, power off for cooling and depressurization. When the temperature is below 30°C, the Mo-Nb alloy target can be obtained. The relative density of target material reaches 98.5%.
The data show that the relative density of the above target material is greater than 98%, and the higher the temperature, the higher the relative density, the better the quality, in line with the requirements of the product. Therefore, the proposed method of mixing niobium powder and molybdenum powder with average particle size less than 10 μπι in a mixing machine at a mass ratio of 5 ~ 15:85 ~ 95 is feasible, and then vibrating pressing, hot pressing and sintering, and cutting can be used to obtain molybdenum and niobium alloy targets, which can ensure the performance of the sample.
