Silver manufacturing methods of target, more than 4 n silver purity raw materials, using the method of melting or vacuum melting atmosphere will silver raw materials melting, casting and melting soup, and then cooling form ingot casting billet, the step casting billet heat preservation heat treatment immediately, conducted in 400 ~ 900 ℃ temperature range insulation homogenization, heat preservation time more than 0.5 h, then hot rolling delay or air hammer forging, The silver billet is formed, and the cold rolled billet is formed. The cold rolled billet is annealed at 350~700℃ for 0.5 ~3 hours to obtain the silver target with fine and uniform grains. Finally, the large size silver target can be obtained through machine processing. The process has high processing efficiency and can produce large size silver target with good quality and low cost.
Due to its excellent properties such as low resistance and high reflectivity, metallic silver is widely used in the production of thin layers of electrodes or reflective layers, such as optical recording media, solar cells, low radiation glass, liquid crystal display and other products. Silver thin layers are mostly formed by sputtering coating with silver targets as raw materials.
High purity, less impurity content. as liquid crystal displays, solar cells and so on the development of large size glass coating industry, on the one hand, display, solar cells, such as product size increasing, on the other hand to improve the efficiency and reduce the cost of coating, the substrate size is more and more big, the size of target material also will increase, so it has higher requirement for the manufacturing of target material. In general, the industry commonly used multiple target material joining together the way to use the big size of target, but the stitching on the number of pieces, the splicing gap, also in the coating process will affect plasma uniform consistency, and may cause local abnormal discharge, which would reduce the coating quality and yield of products, in addition, joining together the more the number, quality consistency between each piece of the more difficult it is to agree, Finally, the uniformity of the film layer and the quality of the product will be reduced.
Such as low radiation glass coating, the total length of the target can reach 3750mm, splicing single sheet size can reach 600mm, and there is a trend of gradually increasing the maximum length of single sheet; In the thin-film solar cell industry, the length of the common coating target is 1410mm, which is generally a three-piece splicing method with thick ends and thin middle, and the length of the single piece splicing in the middle is nearly 1000mm. The small size circular silver target used in the traditional optical disc industry is produced by forging, but due to the large investment and high cost of forging equipment, and the limitation of the forging die size, the size of the target is small and difficult to enlarge. Therefore, the forging method of small size silver target used in optical disc industry can not meet the production needs of large size products.
