A niobium alloy with high zirconium content, in which Zr content is 5%-12% by weight; The smelting and casting manufacturing method of the alloy includes the following steps :(1) make the metal niobium into niobium sheet, niobium strip and niobium rod; Make active zirconium into zirconium rod or zirconium sheet; (2) Mix Nb material and Zr material according to the principle of Zr excess, and control zirconium excess by 15%-19%; (3) In the electron beam furnace, the electrode is melted and cast into an alloy ingot; (4) The primary alloy ingot is then expanded electron beam melting; (5) Use electron beam melting secondary ingot as electrode for arc melting, and use electromagnetic stirring to make the component melt fully mixed, so as to homogenize the alloy.
Nb alloys with high Zr content are mainly used in the production and processing of magnetron sputtering targets, which can be used for gas phase coating of materials. The basic principle of magnetron sputtering is to add an orthogonal magnetic field and electric field between the sputtering target pole (cathode) and the anode, and fill the high vacuum chamber with the required inert gas (usually Ar gas). The permanent magnet forms a magnetic field of 250 ~ 350 Gauss on the surface of the geba material, and forms an orthogonal electromagnetic field with the high voltage electric field. Under the action of electric field, Ar gas ionization into positive ions and electrons, target and has certain negative pressure, the role of electronic affected by magnetic fields from the target very gas ionization probability with work rights, form a high density plasma near the cathode, Ar ion under the action of lorentz force, and speed to fly to the target surface, bombarding target surface at a high speed, The sputtered atoms on the target follow the momentum conversion principle and fly away from the target with high kinetic energy to the substrate for film deposition.
The fabrication method of Nb alloy with high Zr content includes purifying the metal niobium by electron beam form to get niobium sheet or other ways to get niobium plate or vacuum sintering to get niobium bar and niobium bar, purifying the active metal zirconium by electron beam or arc casting to get wrong ingot, and then processing into wrong rod or plate by advanced step.
