A sputtering tantalum the welding method of convex sets and ring ring, whose character is: the first will be convex sets and ring acid respectively, and then adopt the method of laser spot welding will all fixed on the ring, convex surface treatments with acid, finally will take hold of the clamping ring of the convex platform on three jaw chuck, with the rotation of the W axis in order to complete several convex welding. The invention adopts the method of spot welding first will all convex platform is fixed on the ring, and then carries on the electron beam welding, so you just need to a vacuum to complete all the convex welding, maximum simplifies the processing technology, which greatly improves the machining efficiency, reduces the manufacturing cost, at the same time as all fixed convex first, avoid convex deformation during electron beam welding, The production of waste products is reduced and the processing quality is improved.
Physical vapor deposition (PVD) is one of the most critical processes in the production of semiconductor chips. Its purpose is to deposit metal or metal compounds on silicon wafers or other substrates in the form of thin films, and then through the cooperation of photography and corrosion and other processes, finally forming the complex wiring structure in semiconductor chips. Physical vapor deposition is accomplished by sputtering machine, sputtering tantalum ring is a very important key consumable used in the above process, its main role in semiconductor process has two points:
First: constrain the motion trajectory of sputtering particles, play the role of focusing;
Second: large particles produced in the process of adsorption sputtering, play the role of purification.
In the existing technology, the sputtering tantalum ring is welded between the boss and the ring according to AMS 2681B standard, that is, electron beam welding. Electron beam welding must be completed in the vacuum chamber, welding seven boss on the ring body, the general practice is: assembly boss (1), into the vacuum chamber, vacuum, welding, air release and out of the vacuum chamber, welding seven boss needs to cycle the above process 7 times, the processing efficiency is very low, it is a great waste of energy. At the same time, in the process of electron beam welding, the boss is not fixed, so that the energy of the electron beam is too concentrated in one point during the arc starting, which causes the boss to tilt up, seriously affecting the welding quality and producing waste two.
